Fabrication and characterization of Ge 20 Sb 15 Se 65  chalcogenide glass rib waveguides for telecommunication wavelengths

Li, Jun; Shen, Xiang; Sun, Junqiang; Vu, Khu; Wang, Rongping; Luther-Davies, Barry; Dai, Shixun; Xu, Tiefeng; Nie, Qiuhua; Choi, Duk-Yong

doi:10.1016/j.tsf.2013.07.078

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Fabrication and characterization of Ge 20 Sb 15 Se 65 chalcogenide glass rib waveguides for telecommunication wavelengths

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Li, Jun; Shen, Xiang; Sun, Junqiang; Vu, Khu; Wang, Rongping; Luther-Davies, Barry; Dai, Shixun; Xu, Tiefeng; Nie, Qiuhua; Choi, Duk-Yong

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We report on the fabrication and optical properties of Ge 20Sb15Se65 chalcogenide glass rib waveguides on a single photonic chip.Radio-frequency magnetron sputtering method is employed to deposit 1.36-μm-thick films and reactive ion etching with CHF3 is

Collections	ANU Research Publications
Date published:	2013
Type:	Journal article
URI:	http://hdl.handle.net/1885/74955
Source:	Thin Solid Films
DOI:	10.1016/j.tsf.2013.07.078

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Fabrication and characterization of Ge 20 Sb 15 Se 65 chalcogenide glass rib waveguides for telecommunication wavelengths

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