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Fabrication and characterization of Ge 20 Sb 15 Se 65 chalcogenide glass rib waveguides for telecommunication wavelengths

Li, Jun; Shen, Xiang; Sun, Junqiang; Vu, Khu; Choi, Duk-Yong; Wang, Rongping; Luther-Davies, Barry; Dai, Shixun; Xu, Tiefeng; Nie, Qiuhua

Description

We report on the fabrication and optical properties of Ge 20Sb15Se65 chalcogenide glass rib waveguides on a single photonic chip.Radio-frequency magnetron sputtering method is employed to deposit 1.36-μm-thick films and reactive ion etching with CHF3 is

CollectionsANU Research Publications
Date published: 2013
Type: Journal article
URI: http://hdl.handle.net/1885/74955
Source: Thin Solid Films
DOI: 10.1016/j.tsf.2013.07.078

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