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Fabrication and characterization of Ge 20 Sb 15 Se 65 chalcogenide glass rib waveguides for telecommunication wavelengths

Li, Jun; Shen, Xiang; Sun, Junqiang; Vu, Khu; Wang, Rongping; Luther-Davies, Barry; Dai, Shixun; Xu, Tiefeng; Nie, Qiuhua; Choi, Duk-Yong

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We report on the fabrication and optical properties of Ge 20Sb15Se65 chalcogenide glass rib waveguides on a single photonic chip.Radio-frequency magnetron sputtering method is employed to deposit 1.36-μm-thick films and reactive ion etching with CHF3 is

dc.contributor.authorLi, Jun
dc.contributor.authorShen, Xiang
dc.contributor.authorSun, Junqiang
dc.contributor.authorVu, Khu
dc.contributor.authorWang, Rongping
dc.contributor.authorLuther-Davies, Barry
dc.contributor.authorDai, Shixun
dc.contributor.authorXu, Tiefeng
dc.contributor.authorNie, Qiuhua
dc.contributor.authorChoi, Duk-Yong
dc.date.accessioned2015-12-13T22:30:42Z
dc.identifier.issn0040-6090
dc.identifier.urihttp://hdl.handle.net/1885/74955
dc.description.abstractWe report on the fabrication and optical properties of Ge 20Sb15Se65 chalcogenide glass rib waveguides on a single photonic chip.Radio-frequency magnetron sputtering method is employed to deposit 1.36-μm-thick films and reactive ion etching with CHF3 is
dc.publisherElsevier
dc.sourceThin Solid Films
dc.subjectKeywords: Chalcogenide glass; Difference method; Fabrication and characterizations; Low surface roughness; Magnetron sputtering method; Normal dispersion; Rib waveguides; Telecommunication wavelengths; Dispersion (waves); Fabrication; Germanium; Glass; Surface roug Chalcogenide glasses; Dispersion; Fabrication; Rib waveguides
dc.titleFabrication and characterization of Ge 20 Sb 15 Se 65 chalcogenide glass rib waveguides for telecommunication wavelengths
dc.typeJournal article
local.description.notesImported from ARIES
local.identifier.citationvolume545
dc.date.issued2013
local.identifier.absfor020502 - Lasers and Quantum Electronics
local.identifier.absfor020400 - CONDENSED MATTER PHYSICS
local.identifier.absfor091200 - MATERIALS ENGINEERING
local.identifier.ariespublicationf5625xPUB4394
local.type.statusPublished Version
local.contributor.affiliationLi, Jun, Ningbo University
local.contributor.affiliationShen, Xiang, Ningbo University
local.contributor.affiliationSun, Junqiang, Huazhong University of Science and Technology
local.contributor.affiliationVu, Khu, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationChoi, Duk-Yong, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationWang, Rongping, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationLuther-Davies, Barry, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationDai, Shixun, Ningbo University
local.contributor.affiliationXu, Tiefeng, Ningbo University
local.contributor.affiliationNie, Qiuhua, Ningbo University
local.description.embargo2037-12-31
local.bibliographicCitation.startpage462
local.bibliographicCitation.lastpage465
local.identifier.doi10.1016/j.tsf.2013.07.078
dc.date.updated2016-02-24T09:24:55Z
local.identifier.scopusID2-s2.0-84884988779
local.identifier.thomsonID000324820800075
CollectionsANU Research Publications

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