Fabrication and characterization of Ge 20 Sb 15 Se 65 chalcogenide glass rib waveguides for telecommunication wavelengths
-
Altmetric Citations
Li, Jun; Shen, Xiang; Sun, Junqiang; Vu, Khu; Wang, Rongping; Luther-Davies, Barry; Dai, Shixun; Xu, Tiefeng; Nie, Qiuhua; Choi, Duk-Yong
Description
We report on the fabrication and optical properties of Ge 20Sb15Se65 chalcogenide glass rib waveguides on a single photonic chip.Radio-frequency magnetron sputtering method is employed to deposit 1.36-μm-thick films and reactive ion etching with CHF3 is
dc.contributor.author | Li, Jun | |
---|---|---|
dc.contributor.author | Shen, Xiang | |
dc.contributor.author | Sun, Junqiang | |
dc.contributor.author | Vu, Khu | |
dc.contributor.author | Wang, Rongping | |
dc.contributor.author | Luther-Davies, Barry | |
dc.contributor.author | Dai, Shixun | |
dc.contributor.author | Xu, Tiefeng | |
dc.contributor.author | Nie, Qiuhua | |
dc.contributor.author | Choi, Duk-Yong | |
dc.date.accessioned | 2015-12-13T22:30:42Z | |
dc.identifier.issn | 0040-6090 | |
dc.identifier.uri | http://hdl.handle.net/1885/74955 | |
dc.description.abstract | We report on the fabrication and optical properties of Ge 20Sb15Se65 chalcogenide glass rib waveguides on a single photonic chip.Radio-frequency magnetron sputtering method is employed to deposit 1.36-μm-thick films and reactive ion etching with CHF3 is | |
dc.publisher | Elsevier | |
dc.source | Thin Solid Films | |
dc.subject | Keywords: Chalcogenide glass; Difference method; Fabrication and characterizations; Low surface roughness; Magnetron sputtering method; Normal dispersion; Rib waveguides; Telecommunication wavelengths; Dispersion (waves); Fabrication; Germanium; Glass; Surface roug Chalcogenide glasses; Dispersion; Fabrication; Rib waveguides | |
dc.title | Fabrication and characterization of Ge 20 Sb 15 Se 65 chalcogenide glass rib waveguides for telecommunication wavelengths | |
dc.type | Journal article | |
local.description.notes | Imported from ARIES | |
local.identifier.citationvolume | 545 | |
dc.date.issued | 2013 | |
local.identifier.absfor | 020502 - Lasers and Quantum Electronics | |
local.identifier.absfor | 020400 - CONDENSED MATTER PHYSICS | |
local.identifier.absfor | 091200 - MATERIALS ENGINEERING | |
local.identifier.ariespublication | f5625xPUB4394 | |
local.type.status | Published Version | |
local.contributor.affiliation | Li, Jun, Ningbo University | |
local.contributor.affiliation | Shen, Xiang, Ningbo University | |
local.contributor.affiliation | Sun, Junqiang, Huazhong University of Science and Technology | |
local.contributor.affiliation | Vu, Khu, College of Physical and Mathematical Sciences, ANU | |
local.contributor.affiliation | Choi, Duk-Yong, College of Physical and Mathematical Sciences, ANU | |
local.contributor.affiliation | Wang, Rongping, College of Physical and Mathematical Sciences, ANU | |
local.contributor.affiliation | Luther-Davies, Barry, College of Physical and Mathematical Sciences, ANU | |
local.contributor.affiliation | Dai, Shixun, Ningbo University | |
local.contributor.affiliation | Xu, Tiefeng, Ningbo University | |
local.contributor.affiliation | Nie, Qiuhua, Ningbo University | |
local.description.embargo | 2037-12-31 | |
local.bibliographicCitation.startpage | 462 | |
local.bibliographicCitation.lastpage | 465 | |
local.identifier.doi | 10.1016/j.tsf.2013.07.078 | |
dc.date.updated | 2016-02-24T09:24:55Z | |
local.identifier.scopusID | 2-s2.0-84884988779 | |
local.identifier.thomsonID | 000324820800075 | |
Collections | ANU Research Publications |
Download
File | Description | Size | Format | Image |
---|---|---|---|---|
01_Li_Fabrication_and_2013.pdf | 565.34 kB | Adobe PDF | Request a copy |
Items in Open Research are protected by copyright, with all rights reserved, unless otherwise indicated.
Updated: 17 November 2022/ Responsible Officer: University Librarian/ Page Contact: Library Systems & Web Coordinator