Study of Diffusivity and Electrical Properties of Zr and Hf in Silicon
Date
2002
Authors
Vyvenko, O F
Sachdeva, R
Istratov, A A
Armitage, R
Weber, E R
Deenapanray, Prakash
Jagadish, Chennupati
Gao, Yue
Huff, H R
Journal Title
Journal ISSN
Volume Title
Publisher
Electrochemical Society Inc
Abstract
Description
Keywords
Citation
Collections
Source
Proceedings of the Ninth International Symposium on Silicon Materials Science and Technology
Type
Conference paper