Mechanical Deformation of Crystalline Silicon During Nanoindentation
Deformation during spherical and pointed indentation in (100) crystalline silicon using a UMIS-2000 nanoindenter has been studied using cross-sectional transmission electron microscopy (XTEM), atomic force microscopy and Raman microspectroscopy. XTEM samples were prepared by focused ion beam milling to accurately position the cross-section through the indentations. Indentation loads were chosen below and above the yield point for silicon to investigate the modes of plastic deformation. Slip...[Show more]
|Collections||ANU Research Publications|
|Source:||Materials Research Society Symposium Proceedings vol 647: Ion Beam Synthesis and Processing of Advanced Materials|
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