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Mechanical Deformation of Crystalline Silicon During Nanoindentation

Bradby, Jodie; Williams, James; Wong-Leung, Yin-Yin (Jennifer); Swain, Michael Vincent; Munroe, Paul

Description

Deformation during spherical and pointed indentation in (100) crystalline silicon using a UMIS-2000 nanoindenter has been studied using cross-sectional transmission electron microscopy (XTEM), atomic force microscopy and Raman microspectroscopy. XTEM samples were prepared by focused ion beam milling to accurately position the cross-section through the indentations. Indentation loads were chosen below and above the yield point for silicon to investigate the modes of plastic deformation. Slip...[Show more]

CollectionsANU Research Publications
Date published: 2001
Type: Conference paper
URI: http://hdl.handle.net/1885/68519
Source: Materials Research Society Symposium Proceedings vol 647: Ion Beam Synthesis and Processing of Advanced Materials

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