Skip navigation
Skip navigation

Mechanical Deformation of Crystalline Silicon During Nanoindentation

Bradby, Jodie; Williams, James; Wong-Leung, Jennifer; Swain, Michael Vincent; Munroe, Paul


Deformation during spherical and pointed indentation in (100) crystalline silicon using a UMIS-2000 nanoindenter has been studied using cross-sectional transmission electron microscopy (XTEM), atomic force microscopy and Raman microspectroscopy. XTEM samples were prepared by focused ion beam milling to accurately position the cross-section through the indentations. Indentation loads were chosen below and above the yield point for silicon to investigate the modes of plastic deformation. Slip...[Show more]

CollectionsANU Research Publications
Date published: 2001
Type: Conference paper
Source: Materials Research Society Symposium Proceedings vol 647: Ion Beam Synthesis and Processing of Advanced Materials


There are no files associated with this item.

Items in Open Research are protected by copyright, with all rights reserved, unless otherwise indicated.

Updated:  17 November 2022/ Responsible Officer:  University Librarian/ Page Contact:  Library Systems & Web Coordinator