Effect of titanium incorporation on the structural, mechanical and biocompatible properties of DLC thin films prepared by reactive-biased target ion beam deposition method
Date
2010
Authors
Bharathy, P. Vijai
Nataraj, D.
Chu, P K
Wang, Huaiyu
Yang, Q.
Mangalampalli, S.R.N. Kiran
Silvestre-Albero, J.
Mangalaraj, D.
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Volume Title
Publisher
Elsevier
Abstract
Amorphous diamond like carbon (DLC) and titanium incorporated diamond like carbon (Ti-DLC) thin films were deposited by using reactive-biased target ion beam deposition method. The effects of Ti incorporation and target bias voltage on the microstructure
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Keywords
Keywords: Amorphous diamond like carbon thin film; As-deposited films; Atmospheric oxygen; Bonding ratio; Diamond like carbon; Diamond-like carbon thin films; DLC film; DLC thin films; FFT analysis; Human osteoblast cells; In-vitro; Ion beam deposition; matrix; Mic Amorphous diamond like carbon thin film; Biocompatibility; Mechanical properties; Reactive-biased target ion beam deposition; Titanium
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Source
Applied Surface Science
Type
Journal article
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2037-12-31
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