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Effect of titanium incorporation on the structural, mechanical and biocompatible properties of DLC thin films prepared by reactive-biased target ion beam deposition method

Bharathy, P. Vijai; Nataraj, D.; Chu, P K; Wang, Huaiyu; Yang, Q.; Mangalampalli, S.R.N. Kiran; Silvestre-Albero, J.; Mangalaraj, D.

Description

Amorphous diamond like carbon (DLC) and titanium incorporated diamond like carbon (Ti-DLC) thin films were deposited by using reactive-biased target ion beam deposition method. The effects of Ti incorporation and target bias voltage on the microstructure

CollectionsANU Research Publications
Date published: 2010
Type: Journal article
URI: http://hdl.handle.net/1885/66835
Source: Applied Surface Science
DOI: 10.1016/j.apsusc.2010.06.052

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