Two Modes of Laser Lithography Fabrication of Three-Dimensional Submicrometer Structures
The modes of laser lithography fabrication of three-dimensional submicrometer structures have been studied. The method is based on the effect of threshold two-photon polymerization of a photosensitive material at the laser beam focus. To determine the lithograph workspace in the coordinates “laser power-speed of the sample displacement with respect to the laser focus,” a series of photonic crystals with the woodpile structure is prepared. Two methods for fabricating three-dimensional...[Show more]
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|Source:||Physics of the solid state|
|01_Shishkin_Two_Modes_of_Laser_Lithography_2014.pdf||6.68 MB||Adobe PDF||Request a copy|
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