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Two Modes of Laser Lithography Fabrication of Three-Dimensional Submicrometer Structures

Shishkin, Ivan; Samusev, K B; Rybin, M V; Limonov, M F; Kiyan, R V; Chichkov, B N; Kivshar, Yuri; Belov, Pavel

Description

The modes of laser lithography fabrication of three-dimensional submicrometer structures have been studied. The method is based on the effect of threshold two-photon polymerization of a photosensitive material at the laser beam focus. To determine the lithograph workspace in the coordinates “laser power-speed of the sample displacement with respect to the laser focus,” a series of photonic crystals with the woodpile structure is prepared. Two methods for fabricating three-dimensional...[Show more]

CollectionsANU Research Publications
Date published: 2014
Type: Journal article
URI: http://hdl.handle.net/1885/60045
Source: Physics of the solid state
DOI: 10.1134/S1063783414110262

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