RELATIONSHIP BETWEEN PECVD SILICON NITRIDE FILM COMPOSITION AND SURFACE AND EDGE PASSIVATION
Date
2007
Authors
Chen, Florence
Romijn, I
Weeber, Arthur
Tan, Jason
Hallam, Brett
Cotter, Jeffrey E
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Publisher
WIP-Renewable Energies
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Source
Proceedings of the European Photovoltaic Solar Energy Conference
Type
Conference paper
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Restricted until
2037-12-31
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