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Propagating double layers in electronegative plasmas

Meige, Albert; Plihon, N.; Hagelaar, Gerjan; Boeuf, Jean-Pierre; Chabert, Pascal; Boswell, Roderick

Description

Double layers have been observed to propagate from the source region to the diffusion chamber of a helicon-type reactor filled up with a low-pressure mixture of Ar SF6 [N. Plihon, J. Appl. Phys. 98, 023306 (2005)]. In the present paper the most significant and new experimental results are reported. A fully self-consistent hybrid model in which the electron energy distribution function, the electron temperature, and the various source terms are calculated is developed to investigate these...[Show more]

CollectionsANU Research Publications
Date published: 2007
Type: Journal article
URI: http://hdl.handle.net/1885/53747
Source: Physics of Plasmas
DOI: 10.1063/1.2736946

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