Meige, Albert; Plihon, N.; Hagelaar, Gerjan; Boeuf, Jean-Pierre; Chabert, Pascal; Boswell, Roderick
Double layers have been observed to propagate from the source region to the diffusion chamber of a helicon-type reactor filled up with a low-pressure mixture of Ar SF6 [N. Plihon, J. Appl. Phys. 98, 023306 (2005)]. In the present paper the most significant and new experimental results are reported. A fully self-consistent hybrid model in which the electron energy distribution function, the electron temperature, and the various source terms are calculated is developed to investigate these...[Show more]
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