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Electron Rutherford back-scattering case study: oxidation and ion implantation of aluminium foil

Went, Michael; Vos, Maarten


Electron Rutherford back scattering (ERBS) is a new spectroscopy for determining the composition of surfaces. In this work the surface sensitivity of ERBS was investigated by changing the entrance and exit angle of the electron beam while keeping the scattering angle constant. It was found that in this way the surface sensitivity of the technique can be varied considerably. We use aluminium as a test case for ERBS, as it is well studied. The technique has been used to investigate the oxide film...[Show more]

CollectionsANU Research Publications
Date published: 2007
Type: Journal article
Source: Surface and Interface Analysis
DOI: 10.1002/sia.2603


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