Reduced feature size and improved quality of liquid jet guided laser processing by controlling the intensity profile
Date
2014
Authors
Fell, Andreas
Hopman, Sybille
Vago, Nandor
Kluska, Sven
Franklin, Evan
Weber, Klaus
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Publisher
Optical Society of American (OSA)
Abstract
A way to overcome the highly speckled intensity pattern for the liquid jet guided laser processing technique is investigated. Simulations and experiments proof the feasibility of an advantageous "single speckle" pattern.
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Light, Energy and the Environment, OSA Technical Digest
Type
Conference paper
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2037-12-31
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