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Discharge kinetics of inductively coupled oxygen plasmas: experiment and model

Corr, Cormac; Gomez, S.; Graham, W G


In this paper, neutral and charged particle dynamics in both the capacitive and inductive modes of an inductively coupled oxygen discharge are presented. Langmuir probes, laser-assisted photodetachment and two-photon laser-induced fluorescence are employed to measure plasma parameters in the 13.56MHz system for a range of plasma powers and gas pressures. It is found that the capacitive mode is more electronegative with lower molecular dissociation compared with the inductive mode. However, the...[Show more]

CollectionsANU Research Publications
Date published: 2012
Type: Journal article
Source: Plasma Sources Science and Technology
DOI: 10.1088/0963-0252/21/5/055024


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