Characterization of Laser Ablated GaN/ZnO Bilayer on Si(111)

Date

2003

Authors

Wang, Rongping
Muto, H

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Scientific.Net

Abstract

We have fabricated ZnO and GaN bilayers on silicon (111) wafers by laser ablation in order to develop the preparation techniques of multi-layer devices in optoelectronics. X-ray diffraction patterns showed the film was c-axis oriented vertical to the substrate plane. Scanning electron microscopic images indicated that the surface morphology was improved with increasing deposition temperature. E1(TO) phonon modes of ZnO and GaN, as observed by infrared reflectance measurements, were clearly observed in such bilayers, giving evidence of the presence of GaN films. All these results confirm that the laser ablation method using inactivated N2 flow and a solid-state target is a suitable approach to prepare high quality GaN films.

Description

Keywords

Keywords: Gallium nitride; Laser ablation; Morphology; Optoelectronic devices; Phonons; Scanning electron microscopy; X ray diffraction analysis; Zinc oxide; Multilayer devices; Semiconducting silicon Gallium Nitride; Infrared Reflectance; Laser Ablation; Thin-Film; Zink Oxide

Citation

Source

Solid State Phenomena

Type

Journal article

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