"Scratching" Carbon Nanotubes onto Si Substrates
Date
2006
Authors
Yu, Jun X
Chen, Ying
Journal Title
Journal ISSN
Volume Title
Publisher
Materials Research Society
Abstract
Large-scale, high-density, and patterned carbon nanotubes (CNTs) on both pure Si and quartz (SiO2) substrates have been produced using different approaches. The CNTs were synthesized by pyrolysis of the ball-milled iron phthalocyanine (FePc) in a tube furnace under a Ar-5% H2 gas flow. Because patterned CNTs are difficult to grow directly on smooth and perfect single-crystalline Si wafer surface, mechanical scratches were created to help the selective deposition and growth of CNTs on the scratched areas. This simple process does not require pre-deposition of any metal catalysts. For SiO2 substrates, which can be readily covered by a CNT film, patterned CNTs are produced using a TEM grid as mask to cover the areas where CNTs are not needed. The growth temperature and vapor density have strong influence on the patterned CNT formation.
Description
Keywords
Keywords: Iron compounds; Pyrolysis; Quartz; Silicon; Silicon wafers; Single crystals; Synthesis (chemical); Transmission electron microscopy; Iron phthalocyanines; Tube furnaces; Carbon nanotubes
Citation
Collections
Source
Materials Research Society Proceedings
Type
Conference paper