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The Impact of Thermal- and Photo-annealing of Chalcogenide Films for Optical Waveguides

Choi, Duk-Yong; Madden, Steve; Wang, Rongping; Luther-Davies, Barry


We applied thermal- and band-edge light annealing on an as-deposited As2S3 film to mitigate its phase separation and, thus to improve the propagation losses of fabricated optical waveguides. Studies of the film micro structure revealed a difference between atomic bonds and linked phases among the as-deposited, thermally-annealed, and optically-annealed films. We fabricated rib-type waveguides with 4 micron width from 0.85 μm thick films, and measured the insertion losses. Around 0.4 and 0.2...[Show more]

CollectionsANU Research Publications
Date published: 2011
Type: Conference paper
Source: Proceedings of the International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim 2011
DOI: 10.1109/IQEC-CLEO.2011.6193728


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