Choi, Duk-Yong; Madden, Steve; Wang, Rongping; Luther-Davies, Barry
We applied thermal- and band-edge light annealing on an as-deposited As2S3 film to mitigate its phase separation and, thus to improve the propagation losses of fabricated optical waveguides. Studies of the film micro structure revealed a difference between atomic bonds and linked phases among the as-deposited, thermally-annealed, and optically-annealed films. We fabricated rib-type waveguides with 4 micron width from 0.85 μm thick films, and measured the insertion losses. Around 0.4 and 0.2...[Show more]
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