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The Impact of Thermal- and Photo-annealing of Chalcogenide Films for Optical Waveguides

Madden, Steve; Wang, Rongping; Luther-Davies, Barry; Choi, Duk-Yong

Description

We applied thermal- and band-edge light annealing on an as-deposited As2S3 film to mitigate its phase separation and, thus to improve the propagation losses of fabricated optical waveguides. Studies of the film micro structure revealed a difference between atomic bonds and linked phases among the as-deposited, thermally-annealed, and optically-annealed films. We fabricated rib-type waveguides with 4 micron width from 0.85 μm thick films, and measured the insertion losses. Around 0.4 and 0.2...[Show more]

dc.contributor.authorMadden, Steve
dc.contributor.authorWang, Rongping
dc.contributor.authorLuther-Davies, Barry
dc.contributor.authorChoi, Duk-Yong
dc.coverage.spatialSydney Australia
dc.date.accessioned2015-12-07T22:50:48Z
dc.date.createdAugust 28 - September 1 2011
dc.identifier.isbn9780977565771
dc.identifier.urihttp://hdl.handle.net/1885/27172
dc.description.abstractWe applied thermal- and band-edge light annealing on an as-deposited As2S3 film to mitigate its phase separation and, thus to improve the propagation losses of fabricated optical waveguides. Studies of the film micro structure revealed a difference between atomic bonds and linked phases among the as-deposited, thermally-annealed, and optically-annealed films. We fabricated rib-type waveguides with 4 micron width from 0.85 μm thick films, and measured the insertion losses. Around 0.4 and 0.2 dB/cm propagation losses were obtained in the waveguides produced from as-deposited and annealed films, respectively. The waveguides produced from photo-annealed film showed almost the same propagation losses to those from thermally-annealed material. Our results, however, indicate optical-annealing provides some advantages over thermal annealing for waveguide fabrication, such as the absence of film cracking which observed at high temperature processing.
dc.publisherIEEE
dc.relation.ispartofseriesConference on Lasers and Electro-Optics/Pacific Rim (CLEOPR 2011)
dc.sourceProceedings of the International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim 2011
dc.subjectKeywords: Annealed films; Atomic bonds; Band edge; Chalcogenide films; Film cracking; High-temperature processing; Propagation loss; Thermal-annealing; Waveguide fabrication; Electric losses; Fabrication; Optical fibers; Optical waveguides; Optics; Phase change mem
dc.titleThe Impact of Thermal- and Photo-annealing of Chalcogenide Films for Optical Waveguides
dc.typeConference paper
local.description.notesImported from ARIES
local.description.refereedYes
dc.date.issued2011
local.identifier.absfor020502 - Lasers and Quantum Electronics
local.identifier.ariespublicationu4695161xPUB49
local.type.statusPublished Version
local.contributor.affiliationChoi, Duk-Yong, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationMadden, Steve, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationWang, Rongping, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationLuther-Davies, Barry, College of Physical and Mathematical Sciences, ANU
local.description.embargo2037-12-31
local.bibliographicCitation.startpage1294
local.bibliographicCitation.lastpage1296
local.identifier.doi10.1109/IQEC-CLEO.2011.6193728
dc.date.updated2016-02-24T11:19:08Z
local.identifier.scopusID2-s2.0-84862059750
CollectionsANU Research Publications

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