Skip navigation
Skip navigation

Micropatterning Layers by Flame Aerosol Deposition-Annealing

Tricoli, Antonio; Graf, M; Mayer, F; Kuhne, S; Hierlemann, A; Pratsinis, S.E

Description

A study was conducted to direct synthesis, deposition, and stabilization of well-defined nanoparticle patterns on microelectronic substrates by using flame aerosol technology. The study produced gas-sensitive metal oxide layers micropatterned on an integrated-circuitry substrates. The aerosol-based method includes sputtering, spray pyrolysis, cluster beam deposition, classified aerosol deposition, combustion chemical vapor deposition, and flame spray pyrolysis (FSP). It was observed during the...[Show more]

CollectionsANU Research Publications
Date published: 2008
Type: Journal article
URI: http://hdl.handle.net/1885/24452
Source: Advanced Materials
DOI: 10.1002/adma.200701844

Download

File Description SizeFormat Image
01_Tricoli_Micropatterning_Layers_by_2008.pdf550.03 kBAdobe PDF    Request a copy


Items in Open Research are protected by copyright, with all rights reserved, unless otherwise indicated.

Updated:  23 August 2018/ Responsible Officer:  University Librarian/ Page Contact:  Library Systems & Web Coordinator