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Micropatterning Layers by Flame Aerosol Deposition-Annealing

Tricoli, Antonio; Graf, M; Mayer, F; Kuhne, S; Hierlemann, A; Pratsinis, S.E


A study was conducted to direct synthesis, deposition, and stabilization of well-defined nanoparticle patterns on microelectronic substrates by using flame aerosol technology. The study produced gas-sensitive metal oxide layers micropatterned on an integrated-circuitry substrates. The aerosol-based method includes sputtering, spray pyrolysis, cluster beam deposition, classified aerosol deposition, combustion chemical vapor deposition, and flame spray pyrolysis (FSP). It was observed during the...[Show more]

CollectionsANU Research Publications
Date published: 2008
Type: Journal article
Source: Advanced Materials
DOI: 10.1002/adma.200701844


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