Tricoli, Antonio; Graf, M; Mayer, F; Kuhne, S; Hierlemann, A; Pratsinis, S.E
A study was conducted to direct synthesis, deposition, and stabilization of well-defined nanoparticle patterns on microelectronic substrates by using flame aerosol technology. The study produced gas-sensitive metal oxide layers micropatterned on an integrated-circuitry substrates. The aerosol-based method includes sputtering, spray pyrolysis, cluster beam deposition, classified aerosol deposition, combustion chemical vapor deposition, and flame spray pyrolysis (FSP). It was observed during the...[Show more]
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