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Morphology of ion irradiation induced nano-porous structures in Ge and Si1-xGex alloys

Alkhaldi, Huda; Kremer, Felipe; Mota-Santiago, Pablo; Nadzri, Allina; Schauries, Daniel; Kirby, N; Ridgway, Mark; Kluth, Patrick


Crystalline Ge and Si1−xGex alloys (x = 0.83, 0.77) of (100) orientation were implanted with 140 keV Ge− ions at fluences between 5 × 1015 to 3 × 1017 ions/cm2, and at temperatures between 23 °C and 200 °C. The energy deposition of the ions leads to the formation of porous structures consisting of columnar pores separated by narrow sidewalls. Their sizes were characterized with transmission electron microscopy, scanning electron microscopy, and small angle x-ray scattering. We show that the...[Show more]

CollectionsANU Research Publications
Date published: 2017
Type: Journal article
Source: Journal of Applied Physics
DOI: 10.1063/1.4978592
Access Rights: Open Access


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