Extraction of cross-sections of inelastic scattering from energy spectra of reflected atomic particles

Abstract

REELS spectra of the electrons reflected off niobium are measured with energy resolution <0.5 eV within the 5-40 eV energy range of the probing beam. The measurements were performed for the scattering angles θ=45° and θ=120° by means of two electron guns. The process of energy losses is described within the framework of a model with three different energy loss laws: surface, intermediate, and bulk layers are considered. Differential cross-sections of inelastic scattering are represented in the form of simple equations.