Neutral gas heating and ion transport in a constricted plasma flow
Date
2017
Authors
Ho, Teck Seng
Charles, Christine
Boswell, Roderick
Journal Title
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Volume Title
Publisher
American Institute of Physics (AIP)
Abstract
Ion-neutral charge exchange collisions are demonstrated to be the dominant heating mechanism in a weakly ionised ∼1 Torr Ar capacitively coupled radiofrequency plasma flowing through a cylinder. In this rarefied regime, thermal conduction is ineffective. The neutral gas temperature is significantly higher in the plasma bulk than in the plasma sheath due to different plasma parameters and ion transport behaviours in these regions. This study is achieved in a computational fluid dynamics and plasma simulation, and is applicable to similar plasmas at different pressures and physical scales.
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Source
Physics of Plasmas
Type
Journal article