Empirical determination of the energy band gap narrowing in highly doped n+ silicon

Date

2013

Authors

Yan, Di
Cuevas, Andres

Journal Title

Journal ISSN

Volume Title

Publisher

American Institute of Physics

Abstract

Highly doped regions in silicon devices should be analyzed using Fermi-Dirac statistics, taking into account energy band gap narrowing (BGN). An empirical expression for the BGN as a function of dopant concentration is derived here by matching the modeled and measured thermal recombination current densities J0 of a broad range of n+ dopant concentration profiles prepared by phosphorus diffusion. The analysis is repeated with Boltzmann statistics in order to determine a second empirical expression for the apparent energy band gap narrowing, which is found to be in good agreement with previous work.

Description

Keywords

Keywords: Boltzmann statistics; Dopant concentrations; Empirical expression; Energy bandgaps; Fermi-Dirac statistics; Phosphorus diffusion; Recombination currents; Silicon devices; Semiconductor doping; Energy gap

Citation

Source

Journal of Applied Physics

Type

Journal article

Book Title

Entity type

Access Statement

License Rights

Restricted until

Downloads