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Creep, hysteresis, and vibration effects attenuation in an AFM PTS

Rana, Md. Sohel; Pota, Hemanshu R.; Petersen, Ian


There is a need, in the wide ranging scientific community, to perform fast scans using atomic force microscope (AFM) with nanoscale accuracy. The performance of AFM at high scanning speeds is limited due to some serious limitations of its scanning unit; i.e, the piezoelectric tube scanner (PTS). In order to increase the imaging speed of an AFM, a multi-input multi-output (MIMO) model predictive control (MPC) scheme is applied to the axes of the PTS to reduce its creep, hysteresis, and vibration...[Show more]

CollectionsANU Research Publications
Date published: 2014
Type: Conference paper
Source: European Control Conference, ECC 2009
DOI: 10.1109/ECC.2014.6862417
Access Rights: Open Access


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