Nguyen, Hieu T.; Han, Young; Ernst, Marco; Fell, Andreas; Franklin, Evan; Macdonald, Daniel
We report the detection of laser-induced damage in laser-doped layers at the surface of crystalline silicon wafers, via micron-scale photoluminescence spectroscopy. The properties of the sub-band-gap emission from the induced defects are found to match the emission characteristics of dislocations. Courtesy of the high spatial resolution of the micro-photoluminescence spectroscopy technique, micron-scale variations in the extent of damage at the edge of the laser-doped region can be detected,...[Show more]
Items in Open Research are protected by copyright, with all rights reserved, unless otherwise indicated.