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Nano-moulding of integrated optical devices

Han, Ting


Planar waveguide devices made by conventional semiconductor methods are typically very costly as a result of expensive tooling, high cost of raw materials, and many slow processing steps. To address the many mass market opportunities that exist today in fields such as consumer devices, sensing, medicine, etc, much lower cost methods are needed. Nanoimprint lithography was introduced to the semiconductor industry in recent years and was regarded as a serious candidate for next generation...[Show more]

CollectionsOpen Access Theses
Date published: 2011
Type: Thesis (PhD)
DOI: 10.25911/5d51569399acb
Access Rights: Open Access


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