The feasibility of Sn, In, or Al doped ZnSb thin film as candidates for phase change material

Date

2016

Authors

Chen, Yimin
Shen, Xiang
Wang, Guoxiang
Xu, Tiefeng
Wang, Rongping
Dai, Shixun
Nie, Qiuhua

Journal Title

Journal ISSN

Volume Title

Publisher

AIP Publishing

Abstract

The potentials of Sn, In, or Al doped ZnSb thin film as candidates for phase change materials have been studied in this paper. It was found that the Zn-Sb bonds were broken by the addition of the dopants and homopolar Zn-Zn bonds and other heteropolar bonds, such as Sn-Sb, In-Sb, and Al-Sb, were subsequently formed. The existence of homopolar Sn-Sn and In-In bonds in Zn₅₀Sb₃₆Sn₁₄ and Zn₄₁Sb₃₆In₂₃ films, but no any Al-Al bonds in Zn₃₅Sb₃₀Al₃₅ film, was confirmed. All these three amorphous films crystallize with the appearance of crystalline rhombohedral Sb phase, and Zn₃₅Sb₃₅Al₃₅ film even exhibits a second crystallization process where the crystalline AlSb phase is separated out. The Zn₃₅Sb₃₀Al₃₅ film exhibits a reversible phase change behavior with a larger Ea ( 4.7 eV), higher Tc (~ 245ᴼ C), better 10-yr data retention (~ 182ᴼ C), less incubation time (20 ns at 70 mW), and faster complete crystallization speed (45 ns at 70 mW). Moreover, Zn₃₅Sb₃₀Al₃₅ film shows the smaller root-mean-square (1.654 nm) and less change of the thickness between amorphous and crystalline state (7.5%), which are in favor of improving the reliability of phase change memory.

Description

Keywords

Sn, In, Al, ZnSb, film, phase, change, material, bond, dopants, homopolar, Zn-Zn bonds, heteropolar bonds, Sn-Sn, In-In, Zn₅₀Sb₃₆Sn₁₄, Zn₄₁Sb₃₆In₂₃, Zn₃₅Sb₃₀Al₃₅

Citation

Source

Journal of Applied Physics

Type

Journal article

Book Title

Entity type

Access Statement

Open Access

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