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Giant pop-ins in nanoindented silicon and germanium caused by lateral cracking

Oliver, D. J.; Lawn, B. R.; Cook, R. F.; Reitsma, M. G.; Bradby, J. E.; Williams, J. S.; Munroe, P.


Giant “pop-in” displacements are observed in crystalline silicon and germanium during high-load nanoindentation with a spherical diamond tip. These events are consistent with material removal triggered by lateral cracking during loading, which poses a hazard to microelectromechanical systems (MEMS) operation. We examine the scaling of the pop-in displacements as a function of peak indentation load and demonstrate a correlation with the depth of the plastic contact zone. We argue that giant...[Show more]

CollectionsANU Research Publications
Date published: 2008
Type: Journal article
Source: Journal of Materials Research
DOI: 10.1557/JMR.2008.0070


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