Characterization of Passivation Layer Losses using on-chip Chalcogenide Glass Resonators with Ultra-high Q-factor in the Mid-infrared Region
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Suk, Daewon
Ko, Kiyoung
Kim, Jingyu
Park, Sang Hee Ko
Wang, Rongping
Choi, Duk Yong
Lee, Hansuek
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Institute of Electrical and Electronics Engineers Inc.
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Abstract
We optically characterize the absorption loss and surface property of nanometer-thin Al2O3 and TiO2 passivation layers using chalcogenide glass-based on-chip resonators with ultrahigh Q-factor in the mid-IR region.
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2024 Conference on Lasers and Electro-Optics, CLEO 2024
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