Palladium gettering in silicon
| dc.contributor.author | Brett, David Alisdair | |
| dc.date.accessioned | 2018-11-22T00:07:21Z | |
| dc.date.available | 2018-11-22T00:07:21Z | |
| dc.date.copyright | 2005 | |
| dc.date.issued | 2005 | |
| dc.date.updated | 2018-11-21T06:50:28Z | |
| dc.format.extent | vi, 160 leaves | |
| dc.identifier.other | b2249564 | |
| dc.identifier.uri | http://hdl.handle.net/1885/151130 | |
| dc.language.iso | en_AU | en_AU |
| dc.rights | Author retains copyright | en_AU |
| dc.subject.lcc | TK7871.85.B74 2005 | |
| dc.subject.lcsh | Getters | |
| dc.subject.lcsh | Palladium | |
| dc.subject.lcsh | Semiconductors Defects | |
| dc.subject.lcsh | Silicon Defects | |
| dc.title | Palladium gettering in silicon | |
| dc.type | Thesis (PhD) | en_AU |
| dcterms.accessRights | Open Access | en_AU |
| local.description.notes | Thesis (Ph.D.)--Australian National University, 2005 | en_AU |
| local.identifier.doi | 10.25911/5d5e710349c46 | |
| local.mintdoi | mint | |
| local.type.status | Accepted Version | en_AU |
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