Fabrication of submicron structures in nanoparticle/polymer composite by holographic lithography and reactive ion etching
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Zhang, A. Ping; He, Sailing; Kim, Kyoung Tae; Yoon, Yong-Kyu; Burzynski, Ryszard; Samoc, Marek; Prasad, Paras N.
Description
We report on the fabrication of nanoparticle/polymer submicron structures by combining holographic lithography and reactive ion etching. Silica nanoparticles are uniformly dispersed in a (SU8) polymer matrix at a high concentration, and in situ polymerization (cross-linking) is used to form a nanoparticle/polymer composite. Another photosensitive SU8 layer cast upon the nanoparticle/SU8 composite layer is structured through holographic lithography, whose pattern is finally transferred to the...[Show more]
Collections | ANU Research Publications |
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Date published: | 2008-11-20 |
Type: | Journal article |
URI: | http://hdl.handle.net/1885/95140 |
Source: | Applied Physics Letters |
DOI: | 10.1063/1.2998541 |
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File | Description | Size | Format | Image |
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Zhang et al Fabrication of Submicron 2008.pdf | 1.14 MB | Adobe PDF |
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