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Fabrication of submicron structures in nanoparticle/polymer composite by holographic lithography and reactive ion etching

Zhang, A. Ping; He, Sailing; Kim, Kyoung Tae; Yoon, Yong-Kyu; Burzynski, Ryszard; Samoc, Marek; Prasad, Paras N.


We report on the fabrication of nanoparticle/polymer submicron structures by combining holographic lithography and reactive ion etching. Silica nanoparticles are uniformly dispersed in a (SU8) polymer matrix at a high concentration, and in situ polymerization (cross-linking) is used to form a nanoparticle/polymer composite. Another photosensitive SU8 layer cast upon the nanoparticle/SU8 composite layer is structured through holographic lithography, whose pattern is finally transferred to the...[Show more]

CollectionsANU Research Publications
Date published: 2008-11-20
Type: Journal article
Source: Applied Physics Letters
DOI: 10.1063/1.2998541


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