Production and Processing of Semiconductor Nanocrystals and Nanostructures for Photonic Applications
This brief review focuses on the production and processing of nanocrystals and nanostructures in silicon, silicon dioxide and compound semiconductors. In each area the use of ion beams to either form or process the nanostructures features prominently. Three specific examples are given, i) Ion irradiation of semiconductors can be used for the formation of novel nanostructures such as the generation of a band of small voids or cavities that exhibit interesting properties, ii) Direct ion...[Show more]
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