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Silicon/silicon oxide/LPCVD silicon nitride stacks: the effect of oxide thicknoww on bulk damage and surface passivation

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Jin, Hao; Weber, Klaus; Blakers, Andrew

CollectionsANU Research Publications
Date published: 2005
Type: Conference paper
URI: http://hdl.handle.net/1885/85601
Source: Proceedings of the 20th European Photovoltaic Solar Energy Conference

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