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Temperature dependence of blistering in hydrogen implanted Si and Ge

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Pyke, Daniel; Elliman, Robert; McCallum, Jeffrey C.

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The temperature dependence of hydrogen blistering rates are measured in (100) Si, (111) Si and (100) Ge substrates implanted with 40 keV H-ions to a fluence of 6 × 1016 H cm-2 using real-time imaging of samples during annealing. The time taken for bliste

dc.contributor.authorPyke, Daniel
dc.contributor.authorElliman, Robert
dc.contributor.authorMcCallum, Jeffrey C.
dc.date.accessioned2015-12-13T22:30:50Z
dc.identifier.issn0168-583X
dc.identifier.urihttp://hdl.handle.net/1885/75023
dc.description.abstractThe temperature dependence of hydrogen blistering rates are measured in (100) Si, (111) Si and (100) Ge substrates implanted with 40 keV H-ions to a fluence of 6 × 1016 H cm-2 using real-time imaging of samples during annealing. The time taken for bliste
dc.publisherElsevier
dc.sourceNuclear Instruments and Methods in Physics Research: Section B
dc.subjectKeywords: Blister; Blister formation; Dissociation energies; Hydrogen blistering; Hydrogen migration; Single activation energy; Temperature dependence; Temperature range; Activation energy; Germanium; Silicon; Temperature distribution; Hydrogen Blister; Germanium; Hydrogen; Silicon
dc.titleTemperature dependence of blistering in hydrogen implanted Si and Ge
dc.typeJournal article
local.description.notesImported from ARIES
local.identifier.citationvolume307
dc.date.issued2013
local.identifier.absfor091205 - Functional Materials
local.identifier.absfor020406 - Surfaces and Structural Properties of Condensed Matter
local.identifier.absfor091204 - Elemental Semiconductors
local.identifier.ariespublicationf5625xPUB4429
local.type.statusPublished Version
local.contributor.affiliationPyke, Daniel, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationElliman, Robert, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationMcCallum, Jeffrey C, University of Melbourne
local.description.embargo2037-12-31
local.bibliographicCitation.startpage29
local.bibliographicCitation.lastpage32
local.identifier.doi10.1016/j.nimb.2012.10.037
local.identifier.absseo970102 - Expanding Knowledge in the Physical Sciences
local.identifier.absseo970109 - Expanding Knowledge in Engineering
local.identifier.absseo970110 - Expanding Knowledge in Technology
dc.date.updated2016-02-24T09:25:21Z
local.identifier.scopusID2-s2.0-84885178398
local.identifier.thomsonID000321722200008
CollectionsANU Research Publications

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