Improving the Morphology and Crystal Quality of AlN Grown on Two-Dimensional hBN
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Chugh, Dipankar; Adhikari, Sonachand; Wong-Leung, Jennifer; Lysevych, Mykhaylo; Jagadish, Chennupati; Tan, Hark Hoe
Description
Aluminum nitride was grown on two-dimensional hexagonal boron nitride (hBN) and sapphire substrates using metal organic vapor phase epitaxy. hBN itself was first deposited directly on 2" sapphire substrates using the same method, which served as templates for AlN growth. For a direct comparison and understanding of the influence of hBN, AlN was grown on both hBN and sapphire, under identical conditions. Growth parameters were varied to study their effect on AlN's surface morphology and...[Show more]
Collections | ANU Research Publications |
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Date published: | 2020 |
Type: | Journal article |
URI: | http://hdl.handle.net/1885/268544 |
Source: | Crystal Growth & Design |
DOI: | 10.1021/acs.cgd.9b01543 |
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acs.cgd.9b01543.pdf | 6.13 MB | Adobe PDF | Request a copy |
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