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Real-Time Drift Correction of a Focused Ion Beam Milling System

Freeman, Darren; Luther-Davies, Barry; Madden, Steve


Focused Ion Beam (FIB) milling systems are attracting increasing attention outside of their traditional role as semiconductor inspection tools, and many researchers are now using FIB systems for nanofabrication. Although the commercial instruments will run for several hours, executing various automated procedures such as preparing TEM sections and milling nano-structures, they invariably suffer from some form of slow and systematic drift in the beam position over the specimen. Use of a FIB...[Show more]

CollectionsANU Research Publications
Date published: 2006
Type: Conference paper
Source: Technical Proceedings Vol. 1 - 3 (CDROM)


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