Passivation of Phosphorus Diffused Black Multi-Crystalline Silicon by Hafnium Oxide
-
Altmetric Citations
Cui, Jie; Phang, Sieu Pheng; Sio, Hang Cheong; Wan, Yimao; Chen, Yifeng; Verlinden, Pierre; Cuevas, Andres
Description
A key challenge for the success of the recent trend to adopt diamond wire sawing for multi‐crystalline silicon wafers is the texturing and passivation of their surfaces. The various so‐called “black silicon” texturing technologies show great promise in providing strong optical gains, but the nano‐scale surface structures resulted from dry etching are challenging to passivate with the conventional plasma enhanced chemical vapor deposition of silicon nitride. In this work, a single layer of...[Show more]
Collections | ANU Research Publications |
---|---|
Date published: | 2017 |
Type: | Journal article |
URI: | http://hdl.handle.net/1885/245840 |
Source: | Physica Status Solidi: Rapid Research Letters |
DOI: | 10.1002/pssr.201700296 |
Download
File | Description | Size | Format | Image |
---|---|---|---|---|
01_Cui_Passivation_of_Phosphorus_2017.pdf | 2.4 MB | Adobe PDF | Request a copy |
Items in Open Research are protected by copyright, with all rights reserved, unless otherwise indicated.
Updated: 17 November 2022/ Responsible Officer: University Librarian/ Page Contact: Library Systems & Web Coordinator