Skip navigation
Skip navigation

Passivation of Phosphorus Diffused Black Multi-Crystalline Silicon by Hafnium Oxide

Cui, Jie; Phang, Sieu Pheng; Sio, Hang Cheong; Wan, Yimao; Chen, Yifeng; Verlinden, Pierre; Cuevas, Andres


A key challenge for the success of the recent trend to adopt diamond wire sawing for multi‐crystalline silicon wafers is the texturing and passivation of their surfaces. The various so‐called “black silicon” texturing technologies show great promise in providing strong optical gains, but the nano‐scale surface structures resulted from dry etching are challenging to passivate with the conventional plasma enhanced chemical vapor deposition of silicon nitride. In this work, a single layer of...[Show more]

CollectionsANU Research Publications
Date published: 2017
Type: Journal article
Source: Physica Status Solidi: Rapid Research Letters
DOI: 10.1002/pssr.201700296


File Description SizeFormat Image
01_Cui_Passivation_of_Phosphorus_2017.pdf2.4 MBAdobe PDF    Request a copy

Items in Open Research are protected by copyright, with all rights reserved, unless otherwise indicated.

Updated:  19 May 2020/ Responsible Officer:  University Librarian/ Page Contact:  Library Systems & Web Coordinator