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Achieving a narrow size distribution of Au particles at a precise depth in SiO2 by segregation of Au precipitates

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Charnvanichborikarn, Supakit; Conway, Martin; Wong-Leung, Jennifer; Williams, James

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We propose a new method of confining Au nanoparticles of a narrow size distribution at a precise depth in an SiO2 matrix. The process involves the formation of nanocavities in silicon by hydrogen implantation and annealing (at 850 °C), followed by Au get

dc.contributor.authorCharnvanichborikarn, Supakit
dc.contributor.authorConway, Martin
dc.contributor.authorWong-Leung, Jennifer
dc.contributor.authorWilliams, James
dc.date.accessioned2015-12-07T22:16:13Z
dc.identifier.issn0957-4484
dc.identifier.urihttp://hdl.handle.net/1885/17936
dc.description.abstractWe propose a new method of confining Au nanoparticles of a narrow size distribution at a precise depth in an SiO2 matrix. The process involves the formation of nanocavities in silicon by hydrogen implantation and annealing (at 850 °C), followed by Au get
dc.publisherInstitute of Physics Publishing
dc.sourceNanotechnology
dc.subjectKeywords: Au nanoparticles; Au particles; Average diameters; Before and after; Buried oxide layers; Gettering; Hydrogen implantations; matrixes; Nano-cavities; Narrow size distributions; Silicon-on-insulator wafers; Wet oxidations; Hydrogen; Oxidation; Semiconducti
dc.titleAchieving a narrow size distribution of Au particles at a precise depth in SiO2 by segregation of Au precipitates
dc.typeJournal article
local.description.notesImported from ARIES
local.identifier.citationvolume20
dc.date.issued2009
local.identifier.absfor020406 - Surfaces and Structural Properties of Condensed Matter
local.identifier.absfor091204 - Elemental Semiconductors
local.identifier.ariespublicationu3251081xPUB3
local.type.statusPublished Version
local.contributor.affiliationCharnvanichborikarn, Supakit, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationConway, Martin, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationWong-Leung, Yin-Yin (Jennifer), College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationWilliams, James, College of Physical and Mathematical Sciences, ANU
local.description.embargo2037-12-31
local.bibliographicCitation.issue18
local.bibliographicCitation.startpage6
local.identifier.doi10.1088/0957-4484/20/18/185603
dc.date.updated2016-02-24T09:52:55Z
local.identifier.scopusID2-s2.0-65549154914
local.identifier.thomsonID000265252900018
CollectionsANU Research Publications

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