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Accurate stoichiometric analysis of polycrystalline indium nitride films with elastic recoil detection

Shrestha, Santosh K; Timmers, Heiko; Butcher, Kenneth Scott A; Wintrebert-Fouquet, Marie

Description

Indium nitride thin films for potential application in high power, high frequency devices have been grown with reactive ion sputtering. Accurate film stoichiometries have been measured with elastic recoil detection using 200 MeV Au projectile ions. The beam-induced depletion of nitrogen during analysis has been found to be severe and non-linear with ion fluence. Assuming the formation of molecular nitrogen as the decisive step leading to nitrogen loss, a model has been applied which reproduces...[Show more]

CollectionsANU Research Publications
Date published: 2004
Type: Journal article
URI: http://hdl.handle.net/1885/78952
Source: Current Applied Physics
DOI: 10.1016/j.cap.2003.11.018

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