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A robust metal-assisted etching process for Ag-catalyzed texturing of silicon

Booker, Katherine; Rahman, Shakir; Chong, Teck-Kong; Mankelow, Rowena; Weber, Klaus; Blakers, Andrew

Description

Silicon structures with excellent light-trapping performance have been developed using a silver-catalyzed metal-assisted etching (MAE) process. The MAE process can be well controlled through variation in solution composition and exposure times, even when the process is conducted on obscured, polished, (111) surfaces. Light trapping was calculated to be >90% of Lambertian for the best performing sample, with solar weighted average reflectance (Rw) of 13% when λ = 400-1000 nm. This represents an...[Show more]

CollectionsANU Research Publications
Date published: 2015-05
Type: Journal article
URI: http://hdl.handle.net/1885/15332
Source: IEEE Journal of Photovoltaics
DOI: 10.1109/JPHOTOV.2015.2400222

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