Open Research at ANU
The Role of Oxygen on the Stability of Gettering of Metals to Cavities in Silicon
| Author(s) | Williams, James; Conway, Martin; Wong-Leung, Yin-Yin (Jennifer); Deenapanray, Prakash; Petravic, Mladen; Brown, Richard Alan; Eaglesham, D; Jacobson, D |
|---|---|
| Type | Journal article |
| Date Published | 1999 |
| Date Created | - |
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