Skip navigation
Skip navigation

Browsing by Author da6fe22b-e379-4aae-948b-dd175ba44d87

Or enter first few letters:  
Showing results 1 to 1 of 1

Gettering of interstitial iron in silicon by plasma-enhanced chemical vapour deposited silicon nitride films

Author(s)Liu, An Yao; Sun, Chang; Markevich, Vladimir P, et al
TypeJournal article
Date Published2016
Date Created-
  • previous
  • 1
  • next

Updated:  12 April 2016/ Responsible Officer:  University Librarian/ Page Contact:  Library Systems & Web Coordinator