Madden, SteveRode, AndreiWang, RongpingLuther-Davies, BarryChoi, Duk-Yong2015-12-222015-12-220003-6951http://hdl.handle.net/1885/95160The authors describe the fabrication of low loss Ge₃₃As₁₂Se₅₅ rib waveguides. Pulsed laser deposition was used to obtain high quality, dense films with the same stoichiometry as the bulk glass, while standard semiconductor processing was used to pattern the waveguides. They obtained rib waveguides of 3, 4, and 5μm wide with propagation losses (0.3dB∕cm at 1550nm) more than ten times lower than previously reported for this material.The support of the Australian Research Council through its Centres of Excellence and Federation Fellow programs is gratefully acknowledged.http://www.sherpa.ac.uk/romeo/issn/0003-6951..."Publishers version/PDF may be used on author's personal website, institutional website or institutional repository" from SHERPA/RoMEO site (as at 22/12/15). Copyright 2007 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in Applied Physics Letters and may be found at https://doi.org/10.1063/1.2754360Keywords: Bulk glass; Laser depositions; Rib waveguides; Semiconductor processings; Glass; Laser pulses; Metallic films; Semiconductor materials; Stoichiometry; Wave propagation; Planar waveguides2007-07-0510.1063/1.27543602016-02-24