Liu, MingkaiSusli, MohamadSilva, DilushaPutrino, GinoKala, HemendraFan, ShutingCole, MichaelFaraone, LorenzoWallace, Vincent P.Padilla, Willie J.Powell, David A.Martyniuk, MariuszShadrivov, Ilya V.2026-01-012026-01-019781943580279ORCID:/0000-0002-3325-3552/work/162295261https://hdl.handle.net/1885/733799078We present an experimental study of ultra-Thin tunable THz absorbers based on MEMSdriven metamaterials. Using the high mechanical sensitivity of thin subwavelength metamaterial absorbers, we proposed a paradigm to combine meta-Atoms and suspended flat membranes to simultaneously maximize the near-field coupling and avoid resonance broadening. We employed a MEMS technology and successfully fabricated THz absorbers based on integration of meta-Atoms and MEMS, demonstrating giant tuning of resonant absorption. The devices presented in this paper are among the best-performing tunable THz absorbers achieved to date, particularly in device thickness and tunability characteristics.2enPublisher Copyright: © 2017 IEEE.2017-10-2510.1364/CLEO_AT.2017.FM1G.585044181895