Sakellariou, ArthurSchwertner, MichaelReinert, TiloButz, Tilman2015-12-070304-3991http://hdl.handle.net/1885/25599Computed tomography (CT) was applied to sets of Scanning Transmission Ion Microscopy (STIM) projections recorded at the LIPSION ion beam laboratory (Leipzig) in order to visualize the 3D-mass distribution in several specimens. Examples for a test structure (copper grid) and for biological specimens (cartilage cells, cygospore) are shown. Scanning Transmission Micro-Tomography (STIM-T) at a resolution of 260 nm was demonstrated for the first time. Sub-micron features of the Cu-grid specimen were verified by scanning electron microscopy. The ion energy loss measured during a STIM-T experiment is related to the mass density of the specimen. Typically, biological specimens can be analysed without staining. Only shock freezing and freeze-drying is required to preserve the ultra-structure of the specimen. The radiation damage to the specimen during the experiment can be neglected. This is an advantage compared to other techniques like X-ray micro-tomography. At present, the spatial resolution is limited by beam position fluctuations and specimen vibrations.Keywords: Energy dissipation; Ion beams; Ion microscopes; Radiation damage; Scanning electron microscopy; Biological specimen; Energy loss projection; Focussed ion beams; Scanning Transmission Ion Microscopy (STIM); Sub-micron resolution; Computerized tomography; a Biological specimen; Energy loss projection; Focussed ion beam; STIM-T; Sub-micron resolution; Tomography200610.1016/j.ultramic.2006.02.0032015-12-07