Zograf, G.P.Koshelev, KirillKorolev, ViacheslavZalogina, AnastasiiaChoi, Duk-YongHollinger, RichardLuther-Davies, BarryZürch, MichaelKartashov, DaniilSpielmann, ChristianMakarov, SergeyKruk, SergeyKivshar, Yuri2023-10-0514-17 Sept978-1-943580-8http://hdl.handle.net/1885/301250Through the utilization of optical bound states in the continuum supported by resonant Si metasurfaces in the mid-IR spectral range, we demonstrate the generation of odd optical harmonics, from the 3rd to the 11th order.The authors acknowledge financial support from the Australian Research Council, the Russian Science Foundation (grant 18-72-10140), the Federal Ministry of Education and Research (BMBF) (grant 57427209).application/pdfen-AU© 2020 Optical Society of American (OSA)Efficient high-order optical harmonics generation from resonant semiconductor metasurfaces supporting bound states in the continuum202010.1364/FIO.2020.FTh5D.42022-08-07