An experimental and analytical study of an asymmetric capacitively coupled plasma used for plasma polymerization

Michelmore, AndrewWhittle, Jason DShort, RobBoswell, RoderickCharles, Christine2015-12-131612-8850http://hdl.handle.net/1885/75804Plasma processing is widely used to provide novel surface modifications to materials for a variety of applications. Typically, the systems used to carry out these modifications are poorly characterised. Here we describe the basics of a global model for aAn experimental and analytical study of an asymmetric capacitively coupled plasma used for plasma polymerization201410.1002/ppap.2014000262015-12-11