Corr, CormacDespiau-Pujo, EChabert, PascalGraham, W GMarro, F.G.Graves, David B2015-12-100022-3727http://hdl.handle.net/1885/56212Comparisons of 2D fluid simulations with experimental measurements of Ar/Cl2 plasmas in a low-pressure inductively coupled reactor are reported. Simulations show that the wall recombination coefficient of Cl atom (γ) is a crucial parameter of the model aComparison between fluid simulations and experiments in inductively coupled argon/chlorine plasmas200810.1088/0022-3727/41/18/1852022015-12-09