Yang, XinboFell, AndreasXu, LujiaFranklin, EvanSurve, SachinMacDonald, DanielWang, Er-Chien (Eric)Vago, NandorWeber, KlausNishimura, HidekiFuyuki, Takashi2015-12-07September3936338337http://hdl.handle.net/1885/24488Author/s retain copyrightLaser chemical processing (LCP) doping formed through differenct dielectric layers201310.4229/28thEUPVSEC2013-2BV.1.82021-08-01