Influence of reactive ion etching on the minority carier lifetime in p-type Si

Deenapanray, PrakashAthukorala, ChintanaMacDonald, DanielEverett, VernieWeber, KlausBlakers, Andrew2015-12-132015-12-13June 6 2003936338191http://hdl.handle.net/1885/85603Influence of reactive ion etching on the minority carier lifetime in p-type Si20052015-12-12