Caillard, A.Charles, ChristineBoswell, RoderickBrault, Pascal2015-12-070093-3813http://hdl.handle.net/1885/23534Although carbon-nanofiber (CNFs) or nanotube growth and their applications are well documented, engineering their shape and their integration in a microsystem for successful applications is an important issue. We report on the synthesis of aligned CNFs (ACNFs) covered by metallic catalytic nanoclusters by a combination of different low-pressure deposition techniques based on high-density radio-frequency helicon plasmas. An image of a "bright-dress-shape"helicon plasma and of a synthesized ACNF coated by Pt nanoclusters is presented.Keywords: Applications; Carbon nanofibers; Carbon nanotubes; Complexation; Helicons; Microsystems; Nanoclusters; Nanofibers; Nanostructures; Plasmas; Platinum; Technology; (CVD); Carbon; Carbon nanofiber; Catalytic nanoclusters; Chemical vapor deposition; Depositio (CVD); Carbon; Carbon nanofiber; Chemical vapor deposition; Microsystem; Nanocluster; Nickel; Plasma; Plasmas; Shape; Sputtering; Substrates200810.1109/TPS.2008.9244222015-12-07