Ahmad, JakariaBazaka, KaterynaWhittle, Jason D.Michelmore, AndrewJacob, Mohan V.2026-01-012026-01-011612-8850https://hdl.handle.net/1885/733801226Understanding the polymerization mechanism of a precursor is indispensable to enhance the requisite material properties. In situ mass spectroscopy and X-ray photoelectron spectroscopy is used in this study to understand the RF plasma polymerization of γ-terpinene. High-resolution mass spectra positive ion mass spectrometry data of the plasma phase demonstrates the presence of oligomeric species of the type [M+H]+ and [2M+H]+, where M represents a unit of the starting material. In addition, there is abundant fragmented species, with most dominant being [M+] (136 m/z), C10H13+ (133 m/z), C9H11+ (119 m/z), and C7H9+ (93 m/z). The results reported in this manuscript enables to comprehend the relationship between the degree of incorporation of oxygen and the rate of deposition with the input RF power.10enPublisher Copyright: © 2015 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.ion fluxmass spectroscopyplasma polymerizationXPSγ-terpinene201510.1002/ppap.20140022084945439619